The effect of stress on the resistivity of submicron aluminum lines

Applied Physics Letters

Volumn 68, Issue 17, 1996, Pages 2372-2374

  Beverly, N L ^a   Alers, G B ^a   Prybyla, J A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343367611     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116137     Document Type: Article

References (16)

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