About mechanism of surface roughness development on poly imide films during anisotropic etching by fast atomic oxygen

European Space Agency, (Special Publication) ESA SP

Volumn , Issue 399, 1997, Pages 243-246

  Chalykh, Anatoly E ^a   Matveev, Vladimir V ^a   Nikiforov, Alexander P ^b   Skurat, Vladimir E ^c   Babayevsky, Petr G ^d   Markov, Alexander V ^e  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^b CENTRAL AEROHYDRODYNAMIC INSTITUTE TSAGI   (Russian Federation)

^c SEMENOV INSTITUTE OF CHEMICAL PHYSICS   (Russian Federation)

^d MOSCOW AVIATION INSTITUTE NATIONAL RESEARCH UNIVERSITY   (Russian Federation)

^e Russian Space Centre Energiya   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343321495     PISSN: 03796566     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)

1. J. Dauphin. Atomic oxygen - a low orbit plaque. In: Looking ahead for materials and processes.Ed. by J.De Boosu e.a.. Elsevier, Amsterdam, 1987, 345-367
2. J.I. KIeiman, e.a. Potential applications of hyperthermal atomic oxygen for treatment of materials and structures. Surface and Interface Analysis, 1995v.23, 289-298
3. J.I. KIeiman, e.a. Surface structure and properties of polymer iiradiated with hyperthermal atomic oxygen. Surface and Interface Analysis, 1995,v.23,335-341
4. A.E. Chalykh, e.a. Application of gas discharge etching for polymer blends structure study. Vysokomolek. soed. 1973,v.A15,N 11, 2598-2600 (in Russian)
5. A.E. Chalykh, e.a. Supermolecular structure of filled crossliked polymers. Vysokomolek. soed. 1975, v.A17,N 4, 836-640
6. W.M. Tong, R.S. Williams. Kinetics of surface growth: Phenomenology, Scaling and Mechanisms of Smoothening and Roughening. In: Ann. Rev. of Physical Chemistry, 1994, v.45,401-438
7. T. Ngo, e.a. Oxygen atom etching of graphite in low earth orbit, 1994, v.314,N1,L817-L822
8. Erosion and growth of solids stimulated by atom and iorr beams. Ed. by G. Kiriakidis. e.a.. Martinus Nijhoff Publisher, Dordrecht, 1986, 465 pp
9. A.P. Nikiforov, V.E. Skurat. Kinetics of polyimide etching by supersonic beams of atomic and molecular oxygen mixture. Chemical Physics Letter, 1993, v.212, N 1-2, 42-49
10. V.E. Skurat, e.a. Simulation of space environment effects on polymer materials. Appl. Surface Sci, 1996 (in press)
11. B.A. Banks, e.a. Atomic oxygen effects on materials. In: NASA/SDIO Space Environmental Effects on Materials Workshop. Proc. of NASA Langley Research Centre, Hampton, Virginia. June 28 - July1, 1988, 197-239