Eddy current micro sensor for use in micro machine applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 319-324

  Yu, P L ^a   Zmood, Ronald B ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

Eddy current; Micromachine; Sensor

Indexed keywords

AMPLIFIERS (ELECTRONIC); CAPACITANCE; COMPOSITE MICROMECHANICS; EDDY CURRENTS; ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SENSORS;

AMPLIFIER INPUTS; APPLICATIONS.; CIRCUIT CONFIGURATIONS; EXPERIMENTAL INVESTIGATIONS; IMPEDANCE AMPLIFIERS; INPUT IMPEDANCES; LOW INPUT IMPEDANCES; MICROMACHINE; SENSOR SENSITIVITIES; STRAY CAPACITANCES; TARGET MATERIALS; WIDE BANDWIDTHS; WIDER RANGES;

EDDY CURRENT TESTING;

EID: 0343301529     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293551     Document Type: Conference Paper

References (9)

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