Fabrication of InP-based wavelength division multiplexing arrayed wavequide filters using chemically assisted ion beam etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4091-4095

  Youtsey, C ^a   Adesida, I ^a   Soole, J B D ^b   Amersfoort, M R ^b   LeBlanc, H P ^b   Andreadakis, N C ^b   Rajhel, A ^b   Caneau, C ^b   Koza, M A ^b   Bhat, R ^b  

^a United States of America   (United States)

^b TELCORDIA TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343259299     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

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