Diamond cold cathodes for electron guns

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 442-445

  Givargizov, E I ^a   Zhirnov, V V ^a   Chubun, N N ^b   Voronin, A B ^a  

^a SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^b ISTOK R and P Corp   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343143294     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589335     Document Type: Article

References (18)

1. N. S. Xu, Y. Tzeng, and Latham, J. Phys. D 26, 1776 (1993).
2. Z.-H. Huang, P. H. Cutler, N. M. Myskovsky, and T. E. Sullivan, Appl. Phys. Lett. 65, 2562 (1994).
3. E. I. Givargizov, V. V. Zhirnov, A. V. Kuznetsov, and P. S. Plekhanov, J. Vac. Sci. Technol. B 14, 2030 (1996).
4. C. Xie, C. N. Potter, R. L. Fink, C. Hilbert, A. Krishnan, D. Eichman, N. Kumar, H. K. Schmidt, M. H. Klark, A. Ross, B. Lin, L. Fredin, B. Baker, D. Patterson, and W. Brookover, Le Vide, les Couches Minces, Suppl. No. 271, 73 (1994).
5. V. V. Zhirnov, A. B. Voronin, E. I. Givargizov, and A. L. Meshcheryakova, J. Vac. Sci. Technol. B 14, 2034 (1996).
6. V. V. Zhirnov, E. I. Givargizov, A. V. Kandidov, B. V. Seleznev, and A. N. Alimova, Technical Digest of the 9th International Vacuum Microelectronics Conference, St. Petersburg, Russia, 1996, J. Vac. Sci. Technol. B, these proceedings.
7. M. V. Geis, J. C. Twichell, C. O. Bozler, D. D. Rathman, N. N. Efremov, K. E. Krohn, M. A. Hollus, R. Uttaro, and T. M. Lyszczarz, Technical Digest of the 6th International Vacuum Microelectronics Conference, Newport, RI, 1993 (unpublished), p. 160.
8. W. K. Lo, M. Skvarla, C. W. Lo, H. G. Craighead, and M. S. Isaacson, J. Vac. Sci. Technol. B 13, 2441 (1995).
9. M. G. R. Thomson, J. Vac. Sci. Technol. B 13, 2455 (1995).
10. M. L. Yu, B. W. Hussey, E. Kratschmer, T. H. P. Chang, and W. A. Mackie, J. Vac. Sci. Technol. B 13, 2436 (1995).
11. S. T. Purcell, Vu Thien Binh, and N. Garcia, Appl. Phys. Lett. 67, 436 (1995).
12. W. K. Lo, M. Skvarla, C. W. Lo, H. G. Craighead, and M. S. Isaacson, J. Vac. Sci. Technol. B 13, 2441 (1995).
13. H. Adachi, Scanning Microsc. 1, 919 (1987).
14. W. A. Mackie, T. Xie, and P. R. Davis, J. Vac. Sci. Technol. B 13, 2459 (1995).
15. E. I. Givargizov, J. Vac. Sci. Technol. B 11, 449 (1993).
16. E.I. Givargizov, V. V. Zhirnov, A. V. Kuznetsov, and P. S. Plekhanov, Mater. Lett. 18, 61 (1993).
17. V. V. Zhirnov, W. B. Choi, J. J. Cuomo, and J. J. Hren, Appl. Surf. Sci. 94/95, 123 (1996).
18. W. B. Choi, J. Liu, M. T. McClure, A. F. Myers, V. V. Zhirnov, J. J. Cuomo, and J. J. Hren, J. Vac. Sci. Technol. B 14, 2050 (1996).