Synthesis of ceramic films on metallic substrates using magnetron-sputtering deposition synchro-enhanced by microwave ECR plasma source ion implantation under high vacuum conditions

Pure and Applied Chemistry

Volumn 70, Issue 6, 1998, Pages 1199-1202

  Ma, Tengcai ^a   Deng, Xinlu ^a   Lu, Wenqi ^a   Zhang, Jialiang ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343092872     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac199870061199     Document Type: Article

References (5)

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5. F. J. Wang and B. Q. Chen. J. Dalian Univ. Technol., 25(1986)65.