Influence of beam incidence angle on dry laser cleaning of surface particles

Applied Surface Science

Volumn 157, Issue 1, 2000, Pages 67-73

  Vereecke, G ^a   Rohr E ^a   Heyns, M M ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DRY CLEANING; LASER APPLICATIONS; SILICA; SILICON NITRIDE; VAN DER WAALS FORCES;

BEAM INCIDENCE ANGLE; DRY LASER CLEANING;

SILICON WAFERS;

EID: 0343090785     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00521-8     Document Type: Article

References (25)

1. The National Technology Roadmap for Semiconductors. 1997;68 Semiconductor Industry Association, San Jose, CA.
2. Park H.K., Grigoropoulos C.P., Leung W.P., Tam A.C. IEEE Trans. Compon., Packag., Manuf. Technol., Part A. 17:1994;631.
3. Harvey E.C., Fletcher J., Engelsberg A.C. Mater. Res. Soc. Symp. Proc. 397:1997;335.
4. Tam A.C., Park H.K., Grigoropoulos C.P. Appl. Surf. Sci. 127-129:1998;721.
5. Engelsberg A.C. Proc. SPIE-Int. Soc. Opt. Eng. 3274:1998;100.
6. Tam A.C., Leung W.P., Zapka W., Ziemlich W. J. Appl. Phys. 71:1992;3515.
7. Kelley J.D., Hovis F.E. Microelectron. Eng. 20:1993;159.
8. Zapka W., Ziemlich W., Tam A.C. Appl. Phys. Lett. 58:1991;2217.
9. Lu Y.F., Song W.D., Ang B.W., Hong M.H., Chan D.S.H., Low T.S. Appl. Phys. A. 65:1997;9.
10. Vereecke G., Röhr E., Heyns M.M. J. Appl. Phys. 85:1999;3837.
11. Kumar D., Ivory S., Mahajan U., Singh R.K. Mater. Res. Soc. Symp. Proc. 477:1997;475.
12. Lee S.J., Imen K., Allen S.D. Microelectron. Eng. 20:1993;145.
13. Héroux J.B., Boughaba S., Ressejac I., Sacher E., Meunier M. J. Appl. Phys. 79:1996;2857.
14. Resnick R., Halliday D. Ondes, Optique et Physique Moderne, Physique. 3:1980;111 Editions du Renouveau Pédagogique, Montréal.
15. Bowling R.A. Mittal K.L. Particles on Surfaces. 1:1988;129 Plenum, New York.
16. Wu X., Sacher E., Meunier M. J. Appl. Phys. 86:1999;1744.
17. Wu X., Sacher E., Meunier M. J. Adhes. 70:1999;167.
18. Leiderer P., Boneberg J., Mosbacher M., Schilling A., Yavas O. Proc. SPIE-Int. Soc. Opt. Eng. 3274:1998;68.
19. Israelachvili J.N. Intermolecular and Surface Forces. 2nd edn. 1991;Academic Press, London.
20. Kaiser R. Mittal K.L. Particles on Surfaces. 2:1989;269 Plenum, New York.
21. Bhattacharya S., Mittal K.L. Surf. Technol. 7:1978;413.
22. von Allmen M. Laser-Beam Interactions with Materials. Springer Series in Materials Science. 2:1987;Springer-Verlag, Berlin.
23. Properties of Silicon, EMIS Datareviews Series. 4:1988;IEE, London.
24. Palik E.D. Handbook of Optical Constants of Solids. II:1991;Academic Press, Boston, MA.
25. Lide D.R. CRC Handbook of Chemistry and Physics. 1992;CRC Press, Boca Raton.