Thin film thickness sensor based on a new magnetostrictive delay line arrangement

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 156-161

  Hristoforou, E ^a   Chiriac, H ^b   Avaritsiotis, J N ^c  

^a HALKIS INSTITUTE OF TECHNOLOGY   (Greece)

^b NATIONAL INSTITUTE OF RESEARCH AND DEVELOPMENT FOR TECHNICAL PHYSICS   (Romania)

^c NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FOURIER TRANSFORMS; MAGNETIC FIELDS; MAGNETOSTRICTION; THICKNESS MEASUREMENT; THIN FILMS;

AIR GAPS; MAGNETOSTRICTIVE DELAY LINE ARRANGEMENT; OUTPUT VOLTAGE; THIN FILM THICKNESS SENSORS;

SENSORS;

EID: 0343060855     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00376-8     Document Type: Article

References (4)

1. Leypold, Film Thickness Sensor Data, 1991.
2. Vazquez M., Hernando A. A soft magnetic wire for sensor applications. J. Phys. D Appl. Phys. 29:1996;939-949.
3. Hristoforou E. Magnetostrictive delay lines and their applications. Sensors and Actuators. 69:1996;183-191.
4. Hristoforou E., Reilly R.E. Force sensors based on distortion in delay lines. IEEE Trans. Magnetics. 28:1992;1974-1977.