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Volumn 76, Issue 1-3, 1999, Pages 43-50
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Study of the mass sensitivity of SH-APM sensors with Maple V
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
COATINGS;
COMPUTER SIMULATION;
FILMS;
PERMITTIVITY;
PIEZOELECTRICITY;
SENSITIVITY ANALYSIS;
STIFFNESS;
STRESSES;
TENSORS;
VISCOSITY;
WAVEGUIDES;
ACOUSTIC PLATE MODE SENSORS;
COPPER PHTHALOCYANINE LAYER;
MASS SENSITIVITY;
MULTILAYER STRUCTURE;
QUARTZ PLATE;
SENSORS;
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EID: 0343060851
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(99)00031-X Document Type: Article |
Times cited : (2)
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References (8)
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