Preparation of tubular silica-glass membranes with thin silica layers by sputtering, using the novel sputtering apparatus for tubular supports

Journal of the American Ceramic Society

Volumn 82, Issue 5, 1999, Pages 1325-1328

  Kuraoka, Koji ^a   Yazawa, Tetsuo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343026415     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1999.tb01915.x     Document Type: Article

References (6)

1. F. J. Norton, "Helium Diffusion Through Glass," J. Am. Ceram. Soc., 36 [3] 90-96 (1953).
2. V. Jayaraman and Y. S. Lin, "Synthesis and Hydrogen Permeation Properties of Ultrathin Palladium-Silver Alloy Membranes," J. Membr. Sci., 104, 251-62 (1995).
3. 2," J. Membr. Sci., 59, 353-58 (1991).
4. A. Basile, E. Drioli, F. Santella, V. Violante, G. Capannelli, and G. Vitulli, "A Study on Catalytic Membrane Reactors for Water Gas Shift Reaction," Gas Sep. Purif., 10, 53-61 (1996).
5. 2 through Surface-Modified Porous Glass Membrane"; pp. 213-22 in Ceramic Transactions, Vol. 31, Porous Materials. Edited by K. Ishizaki, L. Sheppard, S. Okada, T. Hamasaki, and B. Huybrechts. American Ceramic Society, Westerville, OH, 1993.
6. J. H. Thornton, "The Microstructure of Sputter-Deposited Coating," J. Vac. Sci. Technol. A, 4, 3059-65 (1986).