Performance characterization of rf‐driven multicusp ion sources

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1057-1059

  Perkins, L T ^a   de Vries, G J ^a   Herz, P R ^a   Kunkel, W B ^a   Leung, K N ^a   Pickard, D S ^a   Wengrow, A ^a   Williams, M D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

BEAM CURRENTS; BEAM EXTRACTION; CUSPED GEOMETRIES; HYDROGEN IONS; ION SOURCES; MHZ RANGE 01 100; PERFORMANCE TESTING; PLASMA; RF SYSTEMS

Indexed keywords

EID: 0342992854     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146757     Document Type: Conference Paper

References (4)

1. K. N. Leung, RF Multicusp Ion Source Development, ICIS, 1995.
2. K. N. Leung and K. W. Ehlers, Rev. Sci. Instrum. 55, 342 (1984).RSINAK
3. K. N. Leung, D. A. Bachman, P. R. Herz, and M. D. McDonald, Nucl. Instrum. Methods B 74, 291 (1993).NIMBEU
4. L. T. Perkins, P. R. Herz, K. N. Leung, and D. S. Pickard, Rev. Sci. Instrum. 65, 1186 (1994).RSINAK