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Volumn 65, Issue 1, 2001, Pages 495-501
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Optimized rapid thermal process for high efficiency silicon solar cells
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
CONCENTRATION (PROCESS);
HIGH TEMPERATURE EFFECTS;
OXIDATION;
PHOSPHORUS;
SEMICONDUCTOR DEVICE MANUFACTURE;
THERMAL DIFFUSION;
GETTERING EFFECT;
RAPID THERMAL PROCESSING;
SILICON SOLAR CELLS;
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EID: 0342955701
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(00)00132-X Document Type: Article |
Times cited : (9)
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References (5)
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