Magnetron ion etching of through-wafer via holes for GaAs monolithic microwave integrated circuits using SiCl4

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2695-2698

  Mitra, A ^a   Nordquist, C D ^a   Jackson, T N ^a   Mayer, T S ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342825053     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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