Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3149, Issue , 1997, Pages 222-231

  Haddad, Waleed S ^a   Trebes, James E ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

3 D imaging; Image reconstruction; Iterative optimization; Microchips; X ray tomography; Zone plates

Indexed keywords

DIAGNOSTIC RADIOGRAPHY; FAILURE ANALYSIS; IMAGE PROCESSING; IMAGE RECONSTRUCTION; IMAGING SYSTEMS; INTEGRATED CIRCUITS; MEDICAL IMAGING; MICROPROCESSOR CHIPS; OPTICAL INSTRUMENTS; PLATES (STRUCTURAL COMPONENTS); QUALITY ASSURANCE; REPAIR; RESTORATION; TOMOGRAPHY; X RAYS;

3-D IMAGING; ITERATIVE OPTIMIZATION; MICROCHIPS; X-RAY TOMOGRAPHY; ZONE PLATES;

THREE DIMENSIONAL;

EID: 0342790433     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.292721     Document Type: Conference Paper

References (12)

1. See, for example, the Proceedings of the International Symposium on Testing and Failure Analysis (ISTFA), ASM International Pub.
2. See, for example, the Proceedings of the International Reliability Physics Symposium (IRPS), IEEE Pub.
3. W. S. Haddad, I. McNulty, J. E. Trebes, E. H. Anderson, R. A. Levesque and L. Yang, "Ultrahigh-Resolution X-ray Tomography", Science 266, pp. 1213-1215, (1994).
4. I. McNulty, W. S. Haddad, J. E. Trebes, E. H. Anderson, "Soft X-ray Scanning Microtomography with Submicrometer Resolution", Rev. Sci. Instrum. 66 (2), pp. 1431-1433 (1995).
5. W. S. Haddad, J. E. Trebes, D. M. Goodman, H-R. Lee, I. McNulty, E. H. Anderson, A. O. Zalensky, "Ultra High Resolution Soft X-Ray Tomography", X-Ray Microbeam Technology and Applications, Wenbng Yun, Ed., Vol. 2516, pp. 102-107, (SPIE, San Diego, 1995).
6. U. Bonse, R. Nushardt, F. Busch, J. H. Kinney, R. A. Saroyan and M. C. Nichols, "X-Ray Tomographic Microscopy", X-Ray Microscopy III, A. Michette, G. Morrison, C. Buckley, Eds. (Springer-Verlag, Berlin, 1991).
7. J. H. Kinney, Q. C. Johnson, R. A. Saroyan, M. C. Nichols, U. Bonse, R. Nushardt and R. Pahl, Rev. Sci. Instrum. 59, 196 (1988).
8. P. Kirkpatrick and A. V. Baez, J. Opt. Soc. Am. 38, 766 (1948).
9. A. A. Krasnoperova, Z. Chen, F. Cerrina, E. Difabrizio, M. Gentili, W. Yun, B. P. Lai, E. S. Gluskin, "Microfocusing Optics for Hard X-Rays Fabricated by X-Ray Lithography", X-Ray Microbeam Technology and Applications, Wenbng Yun, Ed., Vol. 2516, pp. 102-107, (SPIE, San Diego, 1995).
10. C. Jacobsen, J. Kirz and S. Williams, Ultramicroscopy 47, 55-79 (1992).
11. B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro and B. K. Fujikawa, "Low-Energy X-Ray Interaction Coefficients: Photoabsorption, Scattering and Reflection", At. Data Nucl. Data Tables 27, 1 (1982).
12. A. C. Kak and M. Slaney, Principles of Computerized Tomographic Imaging chap. 3 (IEEE Press, New York, 1988).