Synthesis of a thin film of h-BN obtained by reaction between the diborane and the secondary ionized zone of a nitrogen plasma. Characterization of this deposition;Synthèse d'un film mince àbase de h-BN par réaction du diborane avec un plasma d'azote dans la zone d'ionisation secondaire. Caractérisation de ce dépôt

Comptes Rendus de l'Academie de Sciences - Serie IIb: Mecanique, Physique, Chimie, Astronomie

Volumn 325, Issue 3, 1997, Pages 149-156

  Gay, Sandrine ^a   Mutel, Brigitte ^a   Dessaux, Odile ^a   Goudmand, Pierre ^a  

^a UNIV LILLE   (France)

Author keywords

Boron nitride; Coatings; Nitrogen plasma; Plasma processing and deposition; Thin film

Indexed keywords

EID: 0342776947     PISSN: 12874620     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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9. Supiot P., Dessaux O., Goudmand P., 1995, Spectroscopic analysis of the nitrogen short-lived afterglow induced at 433 MHz, J. Phys. D: Appl. Phys., 28, 1826-1839.