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Volumn 69, Issue 1, 1997, Pages 25-37

Use of a general imaging model to achieve predictive autofocus in the scanning electron microscope

Author keywords

Autofocus; Automatic focus; Depth from defocus (DFD); Modulation transfer function (MTF); Scanning electron microscope (SEM)

Indexed keywords

ABERRATIONS; ALGORITHMS; FOCUSING; FOURIER TRANSFORMS; IMAGING SYSTEMS; OPTICAL RESOLVING POWER; TRANSFER FUNCTIONS;

EID: 0342684457     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00028-4     Document Type: Article
Times cited : (7)

References (15)
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    • F.J. Harris, On the use of windows for harmonic analysis with the discrete fourier transform, Proc. IEEE, 66 (1) (1978) 51-83.
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    • Harris, F.J.1
  • 9
    • 0024172569 scopus 로고
    • Parallel depth recovery by changing camera parameters
    • Innisbrook Resort, Computer Society Press, Tampa, FL, USA, December
    • M. Subbarao, Parallel depth recovery by changing camera parameters, in: 2nd int. conf. on computer vision, Innisbrook Resort, Computer Society Press, Tampa, FL, USA, December 1988, pp. 149-155.
    • (1988) 2nd Int. Conf. on Computer Vision , pp. 149-155
    • Subbarao, M.1
  • 11
    • 33847482600 scopus 로고
    • Continuous focusing of moving objects using DFD1F
    • Machine Vision Applications in Industrial Inspection II, San Jose, CA, February
    • T.-C. Wei, M. Subbarao, Continuous focusing of moving objects using DFD1F, in: Machine Vision Applications in Industrial Inspection II, SPIE Proc. Ser. vol. 2183, San Jose, CA, February 1994, pp. 290-300.
    • (1994) SPIE Proc. Ser. , vol.2183 , pp. 290-300
    • Wei, T.-C.1    Subbarao, M.2
  • 12
    • 33847466757 scopus 로고
    • MEBS Ltd, 14 Cornwall Gdns, London, SW7 4AN
    • E. Munro, Simulations Carried Out, MEBS Ltd, 14 Cornwall Gdns, London, SW7 4AN, 1995.
    • (1995) Simulations Carried out
    • Munro, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.