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Volumn 69, Issue 1, 1997, Pages 25-37
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Use of a general imaging model to achieve predictive autofocus in the scanning electron microscope
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Author keywords
Autofocus; Automatic focus; Depth from defocus (DFD); Modulation transfer function (MTF); Scanning electron microscope (SEM)
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Indexed keywords
ABERRATIONS;
ALGORITHMS;
FOCUSING;
FOURIER TRANSFORMS;
IMAGING SYSTEMS;
OPTICAL RESOLVING POWER;
TRANSFER FUNCTIONS;
AUTOMATIC FOCUS;
DEPTH FROM DEFOCUS (DFD);
MODULATION TRANSFER FUNCTION (MTF);
SCANNING ELECTRON MICROSCOPY;
ARTICLE;
AUTOMATION;
IMAGE PROCESSING;
IMAGE QUALITY;
SCANNING ELECTRON MICROSCOPY;
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EID: 0342684457
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/S0304-3991(97)00028-4 Document Type: Article |
Times cited : (7)
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References (15)
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