Use of a general imaging model to achieve predictive autofocus in the scanning electron microscope

Ultramicroscopy

Volumn 69, Issue 1, 1997, Pages 25-37

  Nicolls, F C ^a   De Jager, G ^a   Sewell, B T ^a  

^a UNIVERSITY OF CAPE TOWN   (South Africa)

Author keywords

Autofocus; Automatic focus; Depth from defocus (DFD); Modulation transfer function (MTF); Scanning electron microscope (SEM)

Indexed keywords

ABERRATIONS; ALGORITHMS; FOCUSING; FOURIER TRANSFORMS; IMAGING SYSTEMS; OPTICAL RESOLVING POWER; TRANSFER FUNCTIONS;

AUTOMATIC FOCUS; DEPTH FROM DEFOCUS (DFD); MODULATION TRANSFER FUNCTION (MTF);

SCANNING ELECTRON MICROSCOPY;

ARTICLE; AUTOMATION; IMAGE PROCESSING; IMAGE QUALITY; SCANNING ELECTRON MICROSCOPY;

EID: 0342684457     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00028-4     Document Type: Article

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