Electron Irradiation Effect in the Quantitative Auger Analysis of PSG

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 16, Issue 5, 1977, Pages 851-852

  Inoue, Tomoyasu ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342646833     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.16.851     Document Type: Article

References (5)

1. S. Thomas: J. appl. Phys. 45 (1974) 161.
2. J. L. Lineweaver: J. appl. Phys. 34 (1963) 1786.
3. Y. E. Strausser and J. S. Johannessen: Nat. Bur. Stand. Special Publication 400–23 (1976) 125.
4. W. E. Spear: Proc. Phys. Soc. (London) B68 (1955) 991.
5. M. P. Borom and R. E. Hanneman: J. appl. Phys. 38 (1967) 2406.