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Volumn 3, Issue 4, 1997, Pages 168-170

A resonant, dielectric micro-motor driven by low ac-voltages (<6V)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342547178 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s005420050075 Document Type: Article

Times cited : (4)

References (11)

1
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- Tai, Y.C.¹ Muller, R.S.²

2
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- Principles in design and microfabrication of variable-capacitance side-drive micromotors
- Mehregany M; Bart SF; Tavrow LS; Lang JH; Senturia St.D: (1990) Principles in design and microfabrication of variable-capacitance side-drive micromotors. J. Vac. Sci. Technol., A8: 3614-3624
- (1990) J. Vac. Sci. Technol. , vol.A8 , pp. 3614-3624
- Mehregany, M.¹ Bart, S.F.² Tavrow, L.S.³ Lang, J.H.⁴ Senturia, St.D.⁵

3
- 0027075677
- Polysilicon micro vibro-motors
- Lee AP; Ljung, PB; Pisano AP: (1992) Polysilicon micro vibro-motors. Proc. IEEE Micro Electro Mechnical Systems, Workshop, pp. 177-182
- (1992) Proc. IEEE Micro Electro Mechnical Systems, Workshop , pp. 177-182
- Lee, A.P.¹ Ljung, P.B.² Pisano, A.P.³

4
- 0024768967
- A design overview of an eccentric-motion electrostatic microactuator (the wobble motor)
- Jacobsen SC; Price RH; Wood JE; Rytting TH; Ralaelof M: (1989) A design overview of an eccentric-motion electrostatic microactuator (the wobble motor). Sensors and Actuators 20: 1-16
- (1989) Sensors and Actuators , vol.20 , pp. 1-16
- Jacobsen, S.C.¹ Price, R.H.² Wood, J.E.³ Rytting, T.H.⁴ Ralaelof, M.⁵

5
- 0027040740
- Theoretical and experimental results of an electrostatic micromotor with large gear ratio fabricated by the LIGA process
- Wallrabe U; Bley P; Krevet B; Menz W; Mohr J: (1992) Theoretical and experimental results of an electrostatic micromotor with large gear ratio fabricated by the LIGA process. Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 4-7
- (1992) Proc. IEEE Micro Electro Mechanical Systems Workshop , pp. 4-7
- Wallrabe, U.¹ Bley, P.² Krevet, B.³ Menz, W.⁴ Mohr, J.⁵

6
- 0023310725
- Design considerations for a practical electrostatic micro-motor
- Trimmer WSN; Gabriel KJ: (1987) Design considerations for a practical electrostatic micro-motor. Sensors and Actuators 11: 189-206
- (1987) Sensors and Actuators , vol.11 , pp. 189-206
- Trimmer, W.S.N.¹ Gabriel, K.J.²

7
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- Analysis of the torquefrequency characteristics of dielectric induction motors
- Fuhr G; Hagedorn R; Gimsa J: (1992) Analysis of the torquefrequency characteristics of dielectric induction motors. Sensors and Actuators, A33: 237-247
- (1992) Sensors and Actuators , vol.A33 , pp. 237-247
- Fuhr, G.¹ Hagedorn, R.² Gimsa, J.³

8
- 0028496678
- Design of asynchronous dielectric micromotors
- Hagedorn R; Fuhr G; Müller T; Schnelle Th; Schnakenberg U; Wagner B: (1994) Design of asynchronous dielectric micromotors. J. Electrostat. 33: 159-185
- (1994) J. Electrostat. , vol.33 , pp. 159-185
- Hagedorn, R.¹ Fuhr, G.² Müller, T.³ Schnelle, Th.⁴ Schnakenberg, U.⁵ Wagner, B.⁶

9
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- Dielectric spectroscopy of single human erythrocytes at physiological ionic strength: Dispersion of the cytoplasm
- Gimsa J; Müller T; Schnelle Th; Fuhr G: (1996) Dielectric spectroscopy of single human erythrocytes at physiological ionic strength: dispersion of the cytoplasm. Biophys. J. 71: 495-506
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- Gimsa, J.¹ Müller, T.² Schnelle, Th.³ Fuhr, G.⁴

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