In situ selective etching of GaAs for improving (Al)GaAs interfaces using tris-dimethylaminoarsenic

Applied Physics Letters

Volumn 70, Issue 19, 1997, Pages 2589-2591

  Li, N Y ^a   Hsin, Y M ^a   Bi, W G ^a   Asbeck, P M ^a   Tu, C W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342460889     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119087     Document Type: Article

References (15)

1. G. Wicks, W. I. Wang, C. E. C. Wood, L. F. Eastman, and L. Rathburn, J. Appl. Phys. 52, 5792 (1981).
2. W. T. Tsang, R Kapre, P. F. Sciortino, Jr, J. Cryst. Growth 136, 42 (1994).
3. K. Tateno and Y. Kohama, presented in 38th Electronic Materials Conference, Santa Barbara, California, 26-28 June 1996.
4. H. Q. Hou, B. E. Hammons, and H. C. Chui, presented in 38th Electronic Materials Conference, Santa Barbara, California, 26-28 June 1996.
5. D. S. L. Mui, T. A. Strand, B. J. Thibeault, L. A. Coldren, P. M. Petroff, and E. L. Hu, Inst. Phys. Conf. Ser. 141, 69 (1995).
6. A. B. Villaflor, H. Asahi, D. Marx, K. Miki, K. Yamamoto, and S. Gonda, J. Cryst. Growth 150, 638 (1995).
7. C. W. Tu, H. K. Dong, and N. Y. Li, J. Cryst. Growth 163, 187 (1996).
8. T. Kaneko, P. Smilauer, and B. A. Joyce, Phys. Rev. Lett. 74, 3289 (1996).
9. M. Micovic, D. L. Miller, F. Flack, and R. W. Streater, Appl. Phys. Lett. 69, 2680 (1996).
10. T. Kaneko, T. Sager, M. Ritz, and K. Eberl, presented in the Ninth International Conference on Molecular Beam Epitaxy, Malibu California, 5-9 August 1996.
11. S. Goto, Y. Nomura, and Y. Morishita, Jpn. J. Appl. Phys. 34, L533 (1995).
12. N. Y. Li, Y. M. Hsin, H. K. Dong, T. Nakamura, P. M. Asbeck, and C. W. Tu, J. Cryst. Growth 150, 562 (1995).
13. N. Y. Li, Y. M. Hsin, P. M. Asbeck, and C. W. Tu, (unpublished).
14. T. H. Chiu, W. T. Tsang, R. M. Kapre, M. D. Williams, and J. F. Ferguson, Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials, p. 599.
15. Y. M. Hsin, N. Y. Li, C. W. Tu, and P. M. Asbeck (unpublished).