AN ANALYTICAL ASPECT OF THE PRESTON EQUATION

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1998-R, Issue , 1998, Pages 33-36

  Hocheng, H ^a   Tsai, H Y ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AIRCRAFT ENGINES;

ANALYTIC MODELING; APPLIED PRESSURE; GLASS POLISHING; MATERIAL REMOVAL; MATERIAL REMOVAL RATE; MECHANICAL PROPERTIES OF MATERIALS; POLISHING PRESSURE; PRESTON EQUATIONS; WAFER SURFACE;

POLISHING;

EID: 0342400626     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1998-1012     Document Type: Conference Paper

References (4)

1. Boresi, A. P., et al., 1978, “Advanced Mechanics of Materials,” 3d ed., pp. 581-627, Wiley, New York.
2. Hocheng, H., Tsai, H. Y. and Chen, L.-J., 1997, “A Kinematic Analysis of CMP Based on Vel ocity Model,” Proc, of 2nd lnt‘1. CMP-MIC. pp.277-280
3. Preston, F. W., 1927, “The Theory and Design of Plate Glass Polishing,’’vol. 11, Journal of the Society of Glass Technology, pp.214-256
4. Shaw, M. C., 1984, “Metal Cutting Principles,” Oxford, pp. 187-194