Surface oxidation chemistry of β-SiC

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 1-9

  Pehrsson, Pehr E ^a   Thoms, Brian D ^a,b,c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b NRC/NRL ^*

^c GEORGIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342378433     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580466     Document Type: Article

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