Fabrication of IC-compatible capacitive sensors by polymer processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3046, Issue , 1997, Pages 70-81

  Pedersen, Michael ^a   Olthuis, Wouter ^a   Bergveld, Piet ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Capacitive sensors; Integrated sensors; Polyimide; Polymer processing; Silicon sensors

Indexed keywords

FABRICATION; FREQUENCY RESPONSE; INTEGRATED CIRCUITS; MICROMACHINING; MICROPHONES; POLYIMIDES; POLYMERS; SILICON SENSORS; SUBSTRATES; TEMPERATURE; TIMING CIRCUITS;

CONDENSER MICROPHONE; DIFFERENTIAL PRESSURE SENSOR; FLAT FREQUENCY RESPONSE; INTEGRATED SENSORS; LOW TEMPERATURES; MICROMACHINING PROCESS; POLYMER PROCESSING; PRESSURE RANGES;

CAPACITIVE SENSORS;

EID: 0342342156     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276630     Document Type: Conference Paper

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