Hole mobility in aluminium implanted silicon

Semiconductor Science and Technology

Volumn 12, Issue 11, 1997, Pages 1433-1437

  Galvagno, G ^a   La Ferla, A ^a   La Via, F ^b   Raineri, V ^b   Gasparotto, A ^c   Carnera, A ^c   Rimini, E ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR   (Italy)

^c UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342289921     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/12/11/018     Document Type: Article

References (13)

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