Dual-tone photo-resists behavior of polymeric photo-acid generators bearing β-ketosulfone units

Journal of Photopolymer Science and Technology

Volumn 9, Issue 1, 1996, Pages 17-20

  Tsunooka, Masahiro ^a   Takemoto, Toshikazu ^a   Shirai, Masamitsu ^a  

^a Osaka City University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342282965     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.9.17     Document Type: Article

References (7)

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7. T. Aoai, A. Umehara, T. Kokubo, J. Photopolym. Sci. Technol. , 3 ( 1990), 389.