Electron beam lithography of microbowtie structures for next-generation optical probe

Journal of Microlithography, Microfabrication and Microsystems

Volumn 1, Issue 2, 2002, Pages 123-135

  Tseng, Ampere A ^a   Chen, Chii D ^b   Wu, C S ^b   Diaz, Rodolfo E ^a   Watts, E ^a  

^a Arizona State University

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Electron Beam lithography; Inspection; Micro nano; Microbowtie; Microfabrication; Optical probe

Indexed keywords

EID: 0242719233     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1479707     Document Type: Article

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