Metal-Induced Lateral Crystallization of Amorphous Silicon under Reduced Nickel Supply

Solid State Phenomena

Volumn 93, Issue , 2003, Pages 207-212

  Makihira, Kenji ^a   Nozaki, Hiroyuki ^a   Asano, Tanemasa ^a   Miyasaka, Mitsutoshi ^b  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b SEIKO EPSON CORPORATION   (Japan)

Author keywords

Metal Induced Crystallization; Needle Like Crystals; Polycrystalline Silicon; Silicon Nano Wire

Indexed keywords

ANNEALING; CRYSTAL GROWTH; CRYSTALLIZATION; DIFFUSION; HIGH TEMPERATURE EFFECTS; LOW TEMPERATURE EFFECTS; NICKEL; NUCLEATION; POLYSILICON;

NEEDLELIKE CRYSTALS;

AMORPHOUS SILICON;

EID: 0242665691     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.93.207     Document Type: Conference Paper

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