Polysilicon Thin-Film Transistors Based on Frequency Doubled cw-Nd:YVO 4 Laser Crystallized Silicon

Solid State Phenomena

Volumn 93, Issue , 2003, Pages 55-60

  Saboundji, A ^a   Michaud, J F ^a   Mohammed Brahim, T ^a   Le Bihan, F ^a   Andra G ^b   Bergmann, J ^b   Falk, F ^b  

^a UNIVERSITÉ DE RENNES 1   (France)

^b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Field Effect Mobility; Laser Crystallization; Polycrystalline Silicon; Thin Film Transistor

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; COOLING; CRYSTALLIZATION; ELECTRON MOBILITY; LASER BEAM EFFECTS; NEODYMIUM LASERS; POLYSILICON;

LASER CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0242664749     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (6)

1. Y. Helen, R. Dassow, M. Nerding, K. Mourgues, F. Raoult, J.R. Köhler, T. Mohammed-Brahim, R. Rogel, O. Bonnaud and J. H. Werner, Thin Solid Films 383, 143 (2001)
2. K. Mourgues, F. Raoult, L. Pichon, T. Mohammed-Brahim, D. Briand and O. Bonnaud, Mat. Res. Soc. Symp. Pro c. 471, 155 (1997)
3. G. Andrä, J. Bergmann, S. Christiansen, F. Falk, M. Nerding, N.D. Sinh, in: Polycrystalline Semiconductors VI - Bulk materials, Thin Films, and Devices, O. Bonnaud, T. Mohammed-Brahim, H.P. Strunk, J.H. Werner eds. (Scitech Publ., Uettikon am See, Switzerland, 2001 p.337)
4. Y. Helen, K. Mourgues, F. Raoult, T. Mohammed-Brahim, O. Bonnaud, R. Rogel, S. Prochasson, P. Boher, D. Zahorski., Thin Solid Films 337, 133 (1999)
5. A. Hara, F. Takeuchi, M. Takei, K. Suga, K. Yoshino, M. Chida, Y. Sano and N. Sasaki, Dig. Tech. Papers of Conf. on Active Matrix Liquid Crystal Displays (AMLCD'02) (Japan Soc. Appl. Phys. 2002 p.227)
6. Y. Helen, PhD thesis, University of Rennes 1, France, (2000)