Ionic species responsible for the plasma anodization of silicon

Applied Physics Letters

Volumn 53, Issue 1, 1988, Pages 57-59

  Barlow, K J ^a   Kiermasz, A ^a   Eccleston, W ^a   Moruzzi, J L ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

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EID: 0242649519     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.100571     Document Type: Article

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