Large Stroke and Low Profile Single Crystal Piezoelectric Actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5053, Issue , 2003, Pages 436-444

  Jiang, Xiaoning ^a   Rehrig, Paul W ^a   Hackenberger, Wesley S ^a   Shrout, Thomas R ^b  

^a TRS TECHNOLOGIES INC   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Crystal cut; Interdigital electrodes; Piezoelectric actuator; Plate actuator; Single crystal piezoelectrics

Indexed keywords

ACTUATORS; ANISOTROPY; CRYSTAL ORIENTATION; ELECTRIC FIELDS; HYSTERESIS; SINGLE CRYSTALS; STRAIN MEASUREMENT;

INTERDIGITAL ELECTRODES; PIEZOELECTRIC ACTUATORS;

PIEZOELECTRIC DEVICES;

EID: 0242610383     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484199     Document Type: Conference Paper

References (12)

1. N. Hagood, et al., "Improving Transverse Actuation of Piezoceramics Using Interdigitated Surface Electrodes", Proc. SPIE, Vol.1917, pp.341-351, 1993.
2. S. Koganezawa and T. Hara, "Development of shear-mode piezoelectric microactuator for precise head positioning", Fujitsu Sci. Tech. J., 37, 2, pp.212-219, 2001.
3. M.P. Langlois, J.P. R. Angel, M. Lloyd-Hart, S. Miller, and G. Angeli, "High order adaptive optics system with a high density spherical membrane deformable mirror", SPIE proceedings 1999.
4. W.Keats Willkie, W. Keith Belvin, and K.C. Park, "Aeroelastic analysis of helicopter rotor blades incorporating anisotropic piezoelectric twist actuation", NASA LARC Technical Reports, 1996.
5. S. Yoshikawa, et al., "Monolithic Piezoelectric Actuators and Vibration Dampers with Interdigital Electrodes", Proc. SPIE, Vol. 3668, pp.578-585, 1999.
6. Y. Fuda, T. Yoshida, T. Ohno, and S. Yoshikawa, "Ceramics actuator with three-dimensional electrode structure", IEEE ISAF'92, pp.573-576.
7. J. Ohashi, Y. Fuda, and T. Ohno, "Multilayer piezoelectric ceramic actuator with interdigital internal electrodes", jan. J. Appl. Phys., Vol.32 (1993), pp.2412-2414.
8. S.E. Park and T.R. Shrout, "Relaxor based ferroelectric single crystals for electromechanical actuators", Mat. Res. Innovat., 1, pp.20-25, 1997.
9. S.E. Park and W. Hackenberger. "High Performance Single Crystal Piezoelectrics: Applications and Issues", Current Opinion in Solid State & Materials Science, 6(2002), pp. 11-18.
10. T. Ritter, X.Geng, K. Shung, P.D. Lopath, S.E. Park, and T.R. Shrout, "Single Crystal PZN/PT-Polymer Composites for Ultrasound Transducer Applications", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.47, No.4, July 2000, pp. 792-800.
11. L. Hackenberger, "Single Crystal Ferroelectrics for High Performance Biomedical Ultrasound Transducers",TRS final technical report of Contract #N00014-97-C-0132, Dec. 1999.
12. P.W. Rehrig, W. Hackenberger, X.N. Jiang, R. Meyer, and X. Geng, "Naval Device Applications of Relaxor Piezoelectric Single Crystals", Proc. Ultrasonics Symposium, Munich, 2002, in press.