Rigorous coupled-wave analysis for multilayered grating structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4987, Issue , 2003, Pages 264-273

  Lee, Wook ^a,c   Degertekin, F Levent ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Coupled Wave Analysis; Multilayered Grating Structure

Indexed keywords

DIFFRACTIVE OPTICS; LIGHT POLARIZATION; MATRIX ALGEBRA; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; MULTILAYERS; NUMERICAL METHODS;

COUPLED-WAVE ANALYSIS; OPTICAL MICROPHONES;

DIFFRACTION GRATINGS;

EID: 0242609102     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473179     Document Type: Conference Paper

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