Performance and Applications of a spectrometer with micromachined scanning grating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4987, Issue , 2003, Pages 284-291

  Gruger H ^a   Wolter, A ^a   Schuster, T ^a   Schenk, H ^a   Lakner, H ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Applications; MEMS; Micro scanning mirror; MOEMS; Performance; Resonant; Scanning grating; Spectrometer; Spectroscopy

Indexed keywords

DIFFRACTION GRATINGS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; MIRRORS; OPTICAL RESOLVING POWER; SENSOR DATA FUSION; SPECTROSCOPY;

OPTICAL ACTUATORS; SCANNING MIRROR CHIPS;

SPECTROMETERS;

EID: 0242609091     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478317     Document Type: Conference Paper

References (4)

1. H. Grüger, A. Wolter, T. Schuster, H. Schenk, H. Lakner, "Realization of a spectrometer with micromachined scanning grating", Proc. Photonics Fabrication Brugge 2002, Symposium 4945, 28 October - 1. November, Brugge, Belgium (2002)
2. rd International Conference on Micro Opto Electro Mechanical Systems, August 31 - September 01, Mainz, p. 3-10 (1999).
3. nd edition, Chapman and Hall, London, New York, 1988
4. H. Schenk, P. Dürr, Th. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kück, "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5, p.715-722 (2000).