Electrical and Optical Characterization of SiC

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 365-370

  Pensl, G ^a   Schmid, F ^a   Ciobanu, F ^a   Laube, M ^a   Reshanov, S A ^a   Schulze, N ^a   Semmelroth, K ^a   Nagasawa, H ^b   Schoner A ^c   Wagner, G ^d  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b HOYA CORPORATION   (Japan)

^c ACREO AB   (Sweden)

^d LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

Admittance Spectroscopy; Aluminum Acceptors; Aluminum Related Defect Centers; FTIR Transmission; Hall Effect; Hall Scattering Factor for Holes; Phosphorus Donors

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); FOURIER TRANSFORM INFRARED SPECTROSCOPY; HALL EFFECT; INFRARED RADIATION; OXIDATION; PHOSPHORUS;

ABSORPTION LINES;

SILICON CARBIDE;

EID: 0242581395     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.433-436.365     Document Type: Conference Paper

References (15)

1. G. Rutsch, R. P. Devaty, W. J. Choyke, D. W. Langer, L. B. Rowland, J. Appl. Phys. Vol. 84 (1998), p. 2062.
2. D. Schulz, K. Irmscher, J. Dolle, W. Eiserbeck, T. Müller, H.-J. Rost, D. Siche, G. Wagner, J. Wollweber, Mater. Sci. Forum Vol. 338-342 (2000), p. 87.
3. M. A. Capano, R. Santhakumar, R. Venugopal, M. R. Melloch, J. A. Cooper, Jr., J. Electron. Mater. Vol. 29 (2000), p. 210.
4. S. Greulich-Weber, phys. stat. sol. (a) Vol. 162 (1997), p. 95.
5. K. Semmelroth, F. Schmid, D. Karg, G. Pensl, M. Maier, S. Greulich-Weber, J.-M. Spaeth, these Conference Proceedings.
6. G. Wellenhofer, U. Rössler, phys. stat. sol. (b) Vol. 202 (1997), p. 107.
7. A. Schöner, Dissertation, Erlangen, 1994.
8. F. Szmulowicz, Phys. Rev. B Vol. 28 (1983), p. 5943.
9. S. A. Reshanov, O. Klettke, G. Pensl, these Conference Proceedings.
10. W. Suttrop, G. Pensl, W. J. Choyke, R. Stein, S. Leibenzeder, J. Appl. Phys. Vol. 72 (1992), p. 3708.
11. R. A. Faulkner, Phys. Rev. Vol. 184 (1969), p. 713.
12. W. M. Chen, N. T. Son, E. Janzen, D. M. Hofmann, B. K. Meyer, phys. stat. sol. (a) Vol. 162 (1997), p. 79.
13. B. Gerlach, J. Pollmann, phys. stat. sol. (b) Vol. 67 (1975), p. 93.
14. S. G. Shridhara, L. L. Clemen, D. G. Nizher, R. P. Devaty, W. J. Choyke, D. J. Larkin, Mat. Sci. Forum Vol. 264-268 (1998), p. 465.
15. T. Troffer, Dissertation, Erlangen, 1998.