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Volumn , Issue , 2003, Pages 265-268
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Breakdown pattern identification in high temperature dielectric films using scanning electron microscopy (SEM)
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DIELECTRIC FILMS;
PHYSICAL VAPOR DEPOSITION;
POLYETHYLENE TEREPHTHALATES;
SCANNING ELECTRON MICROSCOPY;
WEIBULL DISTRIBUTION;
BREAKDOWN PATTERNS;
ELECTRIC POTENTIAL;
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EID: 0242507465
PISSN: 00849162
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (9)
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