Microfabrication and test of a magnetic field sensor using electrodeposited thin film of giant magnetoresistive (Cu/Co)x multilayers

Microsystem Technologies

Volumn 9, Issue 6-7, 2003, Pages 436-440

  Zhang, H ^a   Wang, W ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL; ELECTRODEPOSITION; ELECTROPLATING; GIANT MAGNETORESISTANCE; LITHOGRAPHY; MAGNETIC FIELD MEASUREMENT; MAGNETIC THIN FILMS; MULTILAYERS; X RAY DIFFRACTION ANALYSIS;

MAGNETIC FIELD SENSORS;

MICROSENSORS;

EID: 0242495720     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0240-4     Document Type: Article

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