Composite Thermal Micro-Actuator Array for Tactile Displays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5055, Issue , 2003, Pages 258-267

  Enikov, Eniko T ^a   Lazarov, Kalin V ^a  

^a University of Arizona   (United States)

Author keywords

Piezo actuators; SU8; Tactile array; Tactile illusion; Thermal actuators

Indexed keywords

ARRAYS; MAN MACHINE SYSTEMS; MICROELECTROMECHANICAL DEVICES; VIBRATIONS (MECHANICAL);

THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0242467936     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.483565     Document Type: Conference Paper

References (13)

1. Peterson, K.E., Micromachined membrane switches on Silicon, IBM J. Res. Develop. V.23 (1979), pp. 376-385
2. Larson, L.E., Hacket, R.H., Melendes M.S. and Lohr, R.F., Micromachined microwave actuator(MI-MAC) technology-A new tuning approach for microwave integrated circuits, IEEE Microwave Millimeter-Wave Monolithic circuits Symp. Boston, MA June, pp-27-30, 1991
3. Sun, X.Q., Gu, X.and Carr, X., Lateral in-plane displacement microactuators with combined thermal and electrostatic drive, p. 152-155, Proceedings Solid State Sensor and Actuator Workshop Hilton Head, South Carolina, June 2-6, 1996
4. Noworolski, J. M., Klaassen, E.H., Logan, J.R., Peterson, K. and Maluf, N.I., Process for in-plane and out-ofpale single-crystal-silicon thermal micrioactuators, Sensors and Actuators A, v. 55 (1996), pp.65-69.
5. Dhuler et.al., In plane MEMS thermal actuator and associated fabrication method, Patent No.: US 6, 211, 598, B1, April 3, 2001
6. Paultre, A., Microrelay brings MEMS technology to commercial market, Electronic Products, p. 28, February, 1999
7. E.T. Enikov, K.V. Lazarov and G.R. Gonzales, Microelectrical Mechanical Systems Actuator Array for Tactile Communication, ICCHP 2002, Lecture Notes in Computer Science, v. 2398(2002), pp.551-558.
8. Gonzales, G.R. "Symbol recognition produced by points of tactile stimulation: The illusion of linear continuity", Mayo Clinic Proceedings Vol. 71, pp. 1039-1046, 1996.
9. Gonzales, G.R., Lewis, S.A., and Weaver, A.L., Tactile Illusion Perception in Patients with Central Pain, Mayo Clinic Proceedings Vol. 76, pp. 267-274, 2001.
10. Gonzales, G.R., Manfredi, P.L., and Payne R., Tactile Phi Phenomenon in Mononeuropathy Patients with Tactile Allodynia, Journal of Pain (Suppl), Vol. 2, p. 3, 2001.
11. Huang Q.A. and Shek Lee, N.K., Analysis and design of polysilicon thermal flexure actuator, Journal of Micromechanics and Microengineering, v. 9(1999), p. 64-70.
12. Ebefors, T., Ulfstedt-Mattsson, J., Kalvesten, K. and Stemme G., 3D micro-machined devices based on Polyimide Joint technology, SPIE Vol. 3892, pp. 118-132, 1999
13. Ebefors, T., Kalvesten, E. and Stemme, G. Dynamic actuation of polyimide V-groove joints by electrical heating, Sensors and Actuators, A67, p. 199-204, 1998