Grain boundary diffusion effects on the sputter depth profiles of Co-Ag bilayers

Journal of Applied Physics

Volumn 79, Issue 7, 1996, Pages 3534-3540

  Lee, Y S ^a   Choi, I S ^a   Lim, K Y ^a   Jeong, K ^a   Whang, C N ^a   Choe, H S ^b   Lee, Y P ^c  

^a Yonsei University   (South Korea)

^b Kyungsang University   (South Korea)

^c SunMoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242451156     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361405     Document Type: Article

References (22)

1. K. H. Chae, J. M. Choi, S. M. Jung, J. H. Joo, J. K. Kim, H. J. Kang, and C. N. Whang, Nucl. Instrum. Methods B 88, 387 (1994).
2. J. Fine, T. D. Andreadis, and F. Davarya, Nucl. Instrum. Methods 209/210, 521 (1983).
3. S. J. Simko, Y-T. Cheng, and M. C. Militello, J. Vac. Sci. Technol. A 49, 1477 (1991).
4. Y-T. Cheng, A. A. Dow, and B. M. Clemens, Appl. Phys. Lett. 53, 1346 (1988).
5. D. Marton, J. Fine, and G. P. Chambers, Phys. Rev. Lett. 61, 2697 (1988).
6. J. C. M. Hwang, J. D. Pan, and R. W. Balluffi, J. Appl. Phys. 50, 1339 (1979).
7. J. C. M. Hwang, J. D. Pan, and R. W. Balluffi, J. Appl. Phys. 50, 1349 (1979).
8. A. R. Miedema, Philips Tech. Rev. 36, 218 (1978).
9. T. B. Massalski, Binary Alloy Phase Diagrams, 2nd ed. (ASM International, Metals Park, OH, 1993), Vol. 1. p. 25.
10. A. R. Miedema, Z. Metallkde 69, 455 (1978).
11. I. Markov and S. Stoyanov, Contemp. Phys. 28, 267 (1987).
12. P. M. Ossi, Surf. Sci. 201, L519 (1988).
13. S. Ossicini, R. Memeo, and F. Ciccacci, J. Vac. Sci. Technol. A 3, 387 (1985).
14. M. P. Seah and W. A. Dench, Surf. Interface Anal. 1, 2 (1979).
15. K. Meinel, O. Lichtenberger, and M. Klaua, Phys. Status Solidi 116, 47 (1989).
16. L. G. Harrison, Trans. Faraday Soc. 57, 1191 (1961).
17. J. Philibert, Atom Movements, Diffusion and Mass Transport in Solids (Editions de Physique, Les Ulis, 1991), p. 254.
18. N. A. Gjostein, Diffusion, edited by H. I. Aaronson (American Society for Metals, Metals Park, OH, 1973), Chap. 9.
19. K. H. Chae, J. H. Song, S. M. Jung, H. G. Jang, J. J. Woo, K. Jeong, and C. N. Whang, J. Appl. Phys. 73, 4292 (1993).
20. G. Neumann and W. Hirshwald, Phys. Status Solidi B 55, 99 (1973).
21. C. Kittel, Introduction to Solid State Physics, 5th ed. (Wiley, New York, 1976), p. 74.
22. J. C. M. Hwang and R. W. Balluffi, Scr. Metall. 12, 709 (1978).