Comparison between large area dc-magnetron sputtered and e-beam evaporated molybdenum as thin film electrical contacts

Journal of Materials Processing Technology

Volumn 143-144, Issue 1, 2003, Pages 326-331

  Martinez M A ^a   Guillen C ^a  

^a Inst Energias Renovables Div B   (Spain)

Author keywords

Evaporation; Molybdenum; Optical reflectance; Roughness; Sputtering; X ray diffraction

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CONTACTS; EVAPORATION; MAGNETRON SPUTTERING; PHOTOVOLTAIC EFFECTS; POLYCRYSTALLINE MATERIALS; SOLAR CELLS; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MASS FLOW RATES;

MOLYBDENUM COMPOUNDS;

EID: 0242440056     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00436-9     Document Type: Conference Paper

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