Determination of boron in high-purity sulfuric acid by ester generation and isotope dilution inductively coupled plasma mass spectrometry

Journal of Analytical Atomic Spectrometry

Volumn 18, Issue 10, 2003, Pages 1248-1251

  Park, Chang J ^a   Song, Sunjin ^a,b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; ESTERS; INDUCTIVELY COUPLED PLASMA; ION EXCHANGE; MASS SPECTROMETRY; SOLUTIONS; SULFURIC ACID;

ISOTOPE DILUTION METHOD;

EXTRACTION;

EID: 0242335198     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b306897h     Document Type: Article

References (12)

1. R. Messoussi, S. Verhaverbeke, T. Yabune, M. Nose and T. Ohmi, Jpn J. Appl. Phys., 1996, 35, 1989.
2. The Columbia Encyclopedia, Columbia University Press, New York, 6th edn., 2003.
3. Specifications and Guidelines for Sulfuric Acid (SEMI C44-0699), Semiconductor Equipment and Materials International, San Jose, CA, USA, 1999.
4. K. Kawabata, Y. Kishi and R. Thomas, Spectroscopy, 2003, 18(1), 16.
5. A. Al-Ammar, R. K. Gupta and R. M. Barnes, Spectrochim. Acta, Part B, 1999, 54, 1077.
6. D. C. Grégoire, J. Anal. At. Spectrom., 1990, 5, 623.
7. D. D. Siemer, Anal. Chem., 1982, 54, 1321.
8. D. A. Johnson, D. D. Siemer and W. F. Bauer, Anal. Chim. Acta, 1992, 270, 223.
9. T. Wilke, J. Wildner and G. Wunsch, J. Anal. At. Spectrom., 1997, 12, 1083.
10. M. Musashi, T. Oi, T. Ossaka and H. Kakihana, Anal. Chim. Acta, 1990, 231, 147.
11. I. Papadakis, P. D. P. Taylor and P. de Bievre, Metrologia, 1998, 35, 715.
12. C. Park, Analyst, 1996, 121, 1311.