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Volumn 94, Issue 8, 2003, Pages 5408-5410
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Improved metal-oxide-nitride-oxide-silicon-type flash device with high-k dielectrics for blocking layer
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
DIELECTRIC MATERIALS;
ELECTRIC POTENTIAL;
LEAKAGE CURRENTS;
NITRIDES;
SILICON COMPOUNDS;
SPUTTER DEPOSITION;
BLOCKING LAYERS;
ALUMINUM COMPOUNDS;
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EID: 0242303733
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1609650 Document Type: Article |
Times cited : (47)
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References (15)
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