Plasma Surface Technologies in Germany

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 462-468

  Fellenberg, R ^a   Braeuer, G ^b  

^a VDI Technologiezentrum GmbH   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Plasma surface engineering; Pulse magnetron sputtering; Technology transfer; Tribological coatings

Indexed keywords

COATINGS; CUBIC BORON NITRIDE; DIAMOND LIKE CARBON FILMS; LITHOGRAPHY; MAGNETRON SPUTTERING;

SURFACE ENGINEERING;

PLASMAS;

EID: 0242290392     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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