Impact of Non-Vertical Sidewall on Sub-50 nm FinFET

IEEE International SOI Conference

Volumn , Issue , 2003, Pages 151-152

  Wu, Xusheng ^a   Chan, Philip C H ^a   Chan, Mansun ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; COMPUTER SIMULATION; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; THRESHOLD VOLTAGE; TRANSMISSION ELECTRON MICROSCOPY;

SHORT CHANNEL EFFECTS (SCE);

MOSFET DEVICES;

EID: 0142248010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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3. Jakub Kedzierski, et al., IEEE IEDM, pp247-250, 2002.
4. Digh Hisamoto, et al., IEEE TED, pp2320-25, 2000.
5. Y. K. Choi, et al., IEEE EDL, pp25-27, 2002.
6. B. Yu, et al., IEEE IEDM, pp251-254, 2002.
7. Davinci User's Manual, TCAD, 2000.2.