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Volumn 1, Issue 1, 2002, Pages 3-4
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The science of dirt
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON BEAM LITHOGRAPHY;
METALLIZING;
SCANNING ELECTRON MICROSCOPY;
TRANSISTORS;
DIRTY SCIENCE;
MATERIALS SCIENCE;
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EID: 0142200797
PISSN: 14761122
EISSN: None
Source Type: Journal
DOI: 10.1038/nmat701 Document Type: Review |
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Times cited : (11)
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References (0)
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