Numerical simulation of the production processes of layered materials

Materials Science in Semiconductor Processing

Volumn 6, Issue 1-3, 2003, Pages 71-76

  Sibona, Gustavo J ^a   Schreiber, Sascha ^a   Hoppe, Ronald H W ^a   Stritzker, Bernd ^a   Revnic, Adrian ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Ab initio methods; Molecular dynamics; Tersoff potentials; Thin films

Indexed keywords

BORON; COMPUTER SIMULATION; CRYSTAL LATTICES; CRYSTALLOGRAPHY; ION BEAM ASSISTED DEPOSITION; MOLECULAR DYNAMICS; NUMERICAL METHODS;

TERSOFF POTENTIALS;

THIN FILMS;

EID: 0142198796     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(03)00073-8     Document Type: Article

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