Inelastic electron tunneling spectrometer to characterize metal-oxide-semiconductor devices with ultrathin oxides

Review of Scientific Instruments

Volumn 74, Issue 10, 2003, Pages 4462-4467

  Petit, C ^a   Salace, G ^a  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRIC CONDUCTANCE; ELECTRON TUNNELING; OXIDES; SIGNAL TO NOISE RATIO; SILICON; SPECTROMETERS;

VIBRATIONAL MODES;

MOS DEVICES;

EID: 0142167383     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1611995     Document Type: Article

References (22)

1. R. C. Jacklevic and J. Lambe, Phys. Rev. Lett. 17, 1139 (1966).
2. P. K. Hansma, Tunneling Spectroscopy, edited by P. K. Hansma (Plenum, New York, 1982).
3. D. E. Cullen, E. L. Wolf, and W. D. Compton, Phys. Rev. B 2, 3157 (1970).
4. I. Bencuya, Ph.D. thesis, Yale University, 1984.
5. P. Balk, L. D. Thanh, S. Ewert, M. Kuball, and S. Schmitz, Appl. Surf. Sci. 30, 304 (1987).
6. Y. Wang, R. R. Malik, and P. N. Henriksen, Rev. Sci. Instrum. 64, 890 (1993).
7. T. R. Seman and R. R. Malik, Rev. Sci. Instrum. 70, 2808 (1993).
8. J. Lambe and R. C. Jacklevic, Phys. Rev. 165, 821 (1968).
9. J. Klein, A. Leger, M. Belin, D. Dufourneau, and M. J. L. Sangster, Phys. Rev. B 7, 2336 (1973).
10. H. X. Shen and H. C. Li, Chin. Phys. 2, 232 (1982).
11. D. G. Walmsley, R. B. Floyd, and S. F. J. Read, J. Phys. C 11, 407 (1987).
12. Instruction manual DSP Lock-in Amplifier Model 7265 EG&G Signal Recovery, Workingham RG 2GY, U.K.
13. National Instruments, Austin, TX 78759-3504.
14. F. A. De Thomas, C. Dybowsky, and H. S. Gold, Appl. Spectrosc. 40, 1180 (1986).
15. Y. Skarlatos and R. C. Barker, J. Appl. Phys. 47, 4593 (1976).
16. Lake Shore Cryotronics, Westerville, OH. 43082-9803.
17. G. Salace, C. Petit, and D. Vuillaume, J. Appl. Phys. 91, 5896 (2002).
18. W.-K. Lye, E. Hasegawa, T.-P. Ma, R. C. Barker, Y. Hu, J. Kuehne, and D. Frystak, Appl. Phys. Lett. 71, 2523 (1997).
19. E. L. Wolf, Phys. Rev. Lett. 20, 204 (1968).
20. M. Asche and O. G. Sarbei, Phys. Status Solidi B 103, 11 (1981).
21. C. T. Kirk, Phys. Rev. B 38, 1255 (1988).
22. P. Lange, J. Appl. Phys. 66, 201 (1989).