Optimisation of the epi-ready semi-insulating GaAs wafer preparation procedure

Vacuum

Volumn 72, Issue 3, 2003, Pages 217-223

  Sadowska, Dominika ^a   Gładki, Andrzej ^a   Mazur, Krystyna ^a   Talik, Ewa ^b  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^b UNIVERSITY OF SILESIA   (Poland)

Author keywords

Epi ready wafers; SI GaAs

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; EPITAXIAL GROWTH; MORPHOLOGY; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

SURFACE QUALITY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0142154982     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(03)00143-X     Document Type: Article

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