Preparation and characterization of superhard boron-suboxide films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages 1595-1602

  Huang, H ^a   Ong, C W ^a   Zheng, B ^b   Kwok, R W M ^b   Lau, W M ^b   He, J W ^c  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^c XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BORON COMPOUNDS; ELASTIC MODULI; FILM GROWTH; HARDNESS; ION BOMBARDMENT; OXYGEN; SPUTTERING; SYNTHESIS (CHEMICAL);

SUPERHARD MATERIALS;

THIN FILMS;

EID: 0142090639     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1589528     Document Type: Conference Paper

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