From metallurgical coatings to surface engineering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages

  Sproul, William D ^a  

^a Advanced Energy Industries Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PHYSICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; SURFACE STRUCTURE; VACUUM APPLICATIONS; DIAMONDS; METALLURGY; OPTICAL COATINGS; PLASMAS; SURFACES; THIN FILMS;

SURFACE ENGINEERING; HIGH POWER PULSED SPUTTERING; METALLURGICAL COATINGS; VACUUM MELTING; VACUUM METALLURGY;

COATINGS; PROTECTIVE COATINGS;

EID: 0142089914     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1599868     Document Type: Conference Paper

References (3)

1. R. F. Bunshah, J. Vac. Sci. Technol. 11, 633 (1974).
2. B. S. Movchan and A. V. Demchishin, Fiz. Met. Metalloved. 28, 653 (1969).
3. R. D. Bland, G. J. Kominiak, and D. M. Mattox, J. Vac. Sci. Technol. 11, 671 (1974).