Topographic measurements of real structures in reflection Confocal Laser Scanning Microscope (CLSM)

Microscopy and Microanalysis

Volumn 9, Issue SUPPL. 3, 2003, Pages 162-163

  Wessel, S ^a   Pagel, S ^a   Ritter, M ^b   Hohenberg, H ^b   Wepf, R ^a  

^a BEIERSDORF AG   (Germany)

^b LEIBNIZ INSTITUTE FOR EXPERIMENTAL VIROLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0142059751     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927603016246     Document Type: Conference Paper

References (6)

1. Wilson T (1992) Confocal microscopy Academic Press London
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3. Kagerer B., Brodmann R., Valentin J,. Popp U.:"3D-confocal microscopy for surface analysis of micro-structured materials", SPIE AM 2002, Proceedings of SPIE Vol. #4773
4. Jordan H.-J., Wegner M. and Tiziani H., "Highly accurate non contact characterization of engineering surfaces using confocal microscopy", Meas. Sci. Technol. 9, 1142-1151 (1988)
5. Wendt U, Stielbe-Lange K, Smid M, "On the influence of imaging conditions and algorithms on the quantification of surface topography" Journal of microscopy 207(3), 169-179 (2002)
6. Sinram O; Ritter M; Kleindiek S; Schertel A; Hohenberg H; Albertz J: Calibration of an SEM, Using a Nano Positioning Tilting Table and a Microscopic Calibration Pyramid. Presented Paper, Symposium ISPRS Comm. V (Close-Range Techniques and Machine Vision) Korfu 2002