New detection principles and developments on the GEMINI SUPRA FE-SEM

Microscopy and Microanalysis

Volumn 9, Issue SUPPL. 3, 2003, Pages 106-107

  Jaksch, Heiner ^a   Steigerwald, Michael ^a   Drexel, Volker ^a   Bihr, Hans ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Angle filtered information; Dedicated EBSD analysis; GEMINI principle; PSF detection

Indexed keywords

EID: 0142028622     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927603014028     Document Type: Conference Paper

References (2)

1. Heiner Jaksch, Field emission SEM for true surface imaging and Analysis, Materials World, Oct. 1996
2. Weimer et al, Ultra High resolution SEM - a new approach, Microscopy and Analysis, March 1994, p19