An ESCA study of the Ar ions sputtering effect on diamond

Mechanics and Material Engineering for Science and Experiments

Volumn , Issue , 2003, Pages 573-576

  Liu, Liming ^a,c   Lin, Zhidong ^a   Guo, Yun ^a   Yang, Dequan ^a   Sun, Yining ^a   Victor, Ralchenko ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c NONE   (China)

Author keywords

Ar ion sputtering effect; MPCVD diamond; X ray photoelectron spectroscopy (XPS)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ION BOMBARDMENT; SPUTTERING; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ION SPUTTERING EFFECT;

ION BEAMS;

EID: 0141998010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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